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Laser Bar Visual Inspection System
- Replaces operator in labour intensive facet inspection
- Defects are found every day
- Simultaneous near field inspection
- All results are systematically logged
PRODUCT DESCRIPTION
ST-VISis dedicated tool for laser bar inspection in production environment.This system inspects around 50 laser bars in hour for any visible defects in(sub threshold) near field or at surface of exit facet. While doing this systemprovides also accurate measurement from laser bar overhang and smile.
ST-VIS classifies all images and measurement results to passed / failedby internal criteria / failed by external criteria. These rulings may be usedto see which bars can be sold, when bars can be sold although they have somedefects and when bars are too defective to be sold. ST-VIS also providessystematic way to find defects. For example result stored to database can be:Emitter 18 had too large defect, and its overhang was too big (22.1 µm).
· ST-VIS replacesoperator in labour intensive facetinspection and provides key advantages
· Defects are foundevery day – every hour. System does not have bad days and it does not gettired.
· Simultaneous nearfield inspection provides enhanced way to find faulty devices
· All results aresystematically logged and easily accessible afterwards.
Facet and Near-Field inspection
The facet inspection option can be used to detect particles, cracks andcoating defects down to 1 µm in diameter. With this option a microscope is usedto take an image from front facet which can be analyzed either by the user orby machine vision software.
We have developed measurement modes that work in conjugation with facetinspection using same camera and opto-mechanics. These new measurementoptions are sub-threshold NF imaging and overhang measurement. Sub thresholdimaging of NF helps system to find defects that are difficult to find usingregular machine vision imaging methods. This option provides enhanced defectdetection. With this mode facet inspection (NF and visual) and overhangmeasurement can be done in less than 75 s per bar (19 visual inspection images,19 NF images and overhang measurement). This enables inspection of more than300 laser bars per day.
Overhang measurement
Second new mode, overhang measurement, allows system to use focus datafrom laser diode facet and from submount to determine overhang of laser bar.Overhang of the bar is measured from both edges of bar and for single emittersmeasurement is done at the centre. This verification is important in order toqualify bar mounting process.
Smile measurement
High precision smile measurement entity. Contains high resolution lowdistortion microscope and enhanced vibration isolation. This can be used tomeasure laser bars smile with +/- 0.2 µm accuracy (95% of confidence). Althoughsystem is vibration isolated, due to extreme accuracy of measurement, systemmust be installed in space without excessive noise and vibrations to reachspecified accuracy.
Configurations:
ST-VIS cameras ST-VIS result studio
Specifications:
Property |
Value |
Remarks |
DUT’s per Load tray |
8,16 or 24 |
|
Throughput |
0.5-2 DUTs/min |
For 19-47 emitter bars |
Particle regognition |
1 µm |
|
Near-field continuity check |
Yes |
|
Smile measurement resolution |
100 nm |
|
Smile measurement repeatability |
+/- 250 nm |
Typical |
Overhang resolution |
100 nm |
|
Overhang repeatability |
+/-1µm |
Typical |
Near-field laser drive current |
0.1-100 mA |
Auto-adjusting |
SQL database support |
Yes |
|
Offline results browser |
Yes |
|
Dimensions |
1200 x 750 x 1500 mm |
|
Weight |
220 kg |
|
Power |
230 VAC, 5A, 1-phase |
|
Agencies |
CE |
|
Capabilities: